Coating equipment

Systems for high-precision coatings under ultra-high vacuum conditions

Special coatings meeting extreme standards of accuracy can only be realised under ultra-high vacuum conditions. Building on its experience in the UHV sector, PINK develops and produces customised coating systems – among other things for materials development in laser physics.

View inside the vacuum chamber of a magnetron sputtering unit in which four substrates, diameter 150 mm, can be simultaneously coated.

The spectrum extends from magnetron sputtering units operating on the principle of cathode atomisation with sputter electrodes to modular systems equipped with a pulsed-laser deposition (PLD) system and used for the production and analysis of super-thin films such as cuprate supraconductors, layered manganates, heteroepitactic hybrid structures and metallic thin films.

Production of X-ray mirrors with extra-low scatter: process chamber of a PINK UHV cluster tool device with pulsed-laser deposition on which multi-layer films can be generated with an extremely low roughness of only approximately a tenth of a nanometre. (Image: Fraunhofer Institute for Material and Beam Technology (IWS)

Cluster tool coating system for the production of X-ray mirrors